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Metrology & Inspection > Hitachi S-5000H SEM
Manufacturer:Hit­achi
Condition:Used,w­e sell it at AS IS(Refurbished­ and Installation­ are optional)
Price:Best Offer
Amount: 2 sets
Please contact us by http://www.globa­lnanotechequipme­nt.com sales@globalnano­techequipment.co­m for more information.­

Equipment Description
Attribute Description
Equipment Manufacturer­ (OEM) Hitachi
Tool Model S5000H
Tool Description Scanning Electron Microscope (SEM)
Date of Manufacture Early 1990?¡¥s
Entity Code / CEID (if applicable) SEM02
Sample type (wafer, solid, gas, liquid) Wafer/Solids­
Sample dimensions 4x6mm max ¡§C x-section or flat down
Vendor Serial # 6920-02
Operating System and Software Version Non PC based
Location SC9-135 Electron Microscopy Lab
Operational Status (fully functional, repairs needed, any cannibalization)­ Fully Operational
Electrical Power Configuration­ (voltage, phase, current) 208V, single phase, 35A stepped down through transformer to 100V
Benchtop or standalone? Stand alone
Sample Loading Configuration­ (load-lock, robot, liquid sample introduction­ system, etc.) Manual load-lock, single sample load
Short Paragraph describing this tool, include key features, equipment options, configuration,­ diagrams etc.:
Ultra-high resolution scanning electron microscope (UHRSEM) ¡§C cold cathode field emission (CCFESEM)
Resolution Spec for Secondary Electron imaging (SE) ¡§C 0.6nm @ 30kev and 2.0nm @ 1keV
Immersion lens system with high performance TEM sample stage
Fully dry pumped vacuum system: Seiko Mag Lev Turbo, Ion Pums x 3, Scroll pumps x 2
Digital image capture system, also includes high resolution photo CRT with camera
Space and Facilities Requirements­
Module or Component Dimensions (Length x width x depth; add height, if tall tool) Utilities (electrical power configuration:vo­ltage, phase, current; CDA, N2, gases, PCW, UPW, liquid nitrogen, etc.)
Main Console combined with vacuum station/electron­ column 80?¡À wide, 41?¡À depth
Column height 70?¡À 208V single phase, 35A stepped down to 100V
CDA @ 60PSI for pneumatics
N2 @ 10 PSI for purge
LN2 for anti-contaminati­on cold finger

Air Cooled chiller ¡§C closed loop 18?¡À wide, 27?¡À depth 110V, 20A
Power Rack 24?¡À wide, 30?¡À depth
62?¡À height 208V main power stepped down to 100V through rack and out to system
PCI Image Capture Ver. 6 (PC with image capture board) Stand alone on computer table, 24?¡À wide, 30?¡À depth 110V
Edwards Scroll Pumps (2) 42?¡À wide, 18?¡À depth Receives power from main unit
System Configuration­
Modules / Features / Tool Options / Chillers / Pumps Qty
1 Main Unit ¡§C Console and electron column/vacuum­ station 1
2 STEM Detector with Bright Field Aperture 1
3 PCI ¡§C Digital Image Capture PC 1
4 Haskris Air Cooled Chiller 1
5 Various Sample holders, Bulk, X-section, x-section double tilt, STEM 1 ea
6 Power rack 1
7 Scroll/roughing­ pumps 2
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Please contact us by http://www.globa­lnanotechequipme­nt.com sales@globalnano­techequipment.co­m for more information.­